Determination of the Interface between Amorphous Insulator and Crystalline 4H-SiC in Transmission Electron Microscope Image by using Convolutional Neural Network

Hironori Yoshioka, Tomonori Honda

A rough interface seems to be one of the possible reasons for low channel mobility (conductivity) in SiC MOSFETs. To evaluate the mobility by interface roughness, we drew a boundar…