Investigation of n-type dilute magnetic semiconductor property observed in amorphous AlNO alloy thin film incorporated with dilute nitrogen at 300K

Deena Nath, U. P. Deshpande, N. V. Chandra Shekar +1

In the present work, a thin film was deposited on quartz substrate by reactive RF magnetron sputtering of high purity (99.999%) aluminium target using ultra-high pure (Ar + N2) gas…