5 papers · 1 filter
Studies of laser stimulated photodetachment from nanoparticles for particle charge measurements
Y. A. Ussenov, M. N. Shneider, S. Yatom +1
Determining nanoparticle charge is more challenging than that for microparticles due to change in the particle size during the synthesis substantial plasma property variations, and…
Multi-Diagnostic Characterization of Laser-Produced Tin Plasmas for EUV Lithography
Stanislav Musikhin, Anatoli Morozov, Alec Griffith +2
We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the…
Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications
V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov +3
A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and the sustainability applications. These plasmas often have a complex combinati…
Importance of Gas Heating in Capacitively Coupled Radiofrequency Plasma-assisted Synthesis of Carbon Nanomaterials
Tanvi Nikhar, Sankhadeep Basu, Shota Abe +4
In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency (CCRF) flow-through plasma reactor was operated with methane argon gas mixtures. Signatures of the final…
Laser-stimulated photodetachment of electrons from the negatively charged dielectric substrates
Y. Ussenov, M. N. Shneider, S. Yatom +1
It is shown experimentally that the photodetachment yield of surplus electrons created by plasma-induced charging of non-conductive surfaces of dielectric materials depends on the…