Microwave Properties of Ba-Substituted Pb(Zr${}_{0.52}$Ti${}_{0.48}$)O${}_3$ after Chemical-Mechanical Polishing

Federica Luciano, Lieve Teugels, Sean McMitchell +13

We have studied the effect of chemical-mechanical polishing (CMP) on the ferroelectric, piezoelectric, and microwave dielectric properties of Ba-substituted PZT (BPZT), deposited b…