Processing slightly resolved ro-vibrational spectra during chemical vapor deposition of carbon materials: machine learning approach for plasma thermometry

R. R. Ismagilov, I. P. Kudarenko, S. A. Malykhin +4

A fast optical spectroscopic method for determination rotational ($T_{rot}$) and vibrational ($T_{vib}$) temperatures in two-temperature Boltzmann distribution of the excited state…