Wafer-level substrate-free low-stress silicon nitride platform for THz metadevices and monolithically integrated narrowband metamaterial absorbers

Zhigang Li, Jiarui Jia, Wenjing Jiang +4

The implementation of terahertz (THz) wafer-level metadevices is critical to advance the science for applications including (I) integrated focal plane array which can image for bio…