29 citations · 34 across the 2 of their papers we have counts for
2 papers
physics.plasm-ph2022★ 29 cited
Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field
Sarveshwar Sharma, Sanket Patil, Sudip Sengupta +3
Recently, S Patil et al. have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high rad…
physics.plasm-ph2020★ 5 cited
An enhanced operating regime for high frequency capacitive discharges
Sanket Patil, Sarveshwar Sharma, Sudip Sengupta +2
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field appl…