Growth of (111)-textured SrTiO3 thin films on Pt(111)/Al2O3(1-102) substrates by rf magnetron sputter deposition

Ekaterina Taylor, Ethan R. Cronk, Kalani Perera +2

SrTiO3 thin films, 20-30nm, with high quality crystal structure and low roughness can be used as growth templates for complex oxides or as the dielectric materials for capacitor st…