6 citations · 8 across the 3 of their papers we have counts for
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physics.ins-det2015★ 1 cited
Fine-tuning the etch depth profile via dynamic shielding of ion beam
Lixiang Wu, Keqiang Qiu, Shaojun Fu
We introduce a method for finely adjusting the etch depth profile by dynamic shielding in the course of ion beam etching (IBE), which is crucial for the ultra-precision fabrication…
physics.ins-det2015★ 6 cited
Variable-spot ion beam figuring
Lixiang Wu, Keqiang Qiu, Shaojun Fu
This paper introduces a new scheme of ion beam figuring (IBF), or rather variable-spot IBF, which is conducted at a constant scanning velocity with variable-spot ion beam collimate…