Amorphous VO${}_x$ films with high temperature coefficient of the resistivity grown by reactive e-beam evaporation of V metal

E. V. Tarkaeva, V. A. Ievleva, A. I. Duleba +2

Amorphous VO${}_x$ films without a hysteretic phase transition are stable with respect to thermal cycling and highly demanded as sensitive elements of the resistive thermometers and…