Temperature Dependence of $\beta -G{a}_2{O}_3$ Heteroepitaxy on c-plane Sapphire using Low Pressure Chemical Vapor Deposition

Gavax Joshi, Yogesh Singh Chauhan, Amit Verma

$\beta -G{a}_2{O}_3$ has drawn significant attention for power electronics and deep ultraviolet (UV) photodetectors owing to its wide bandgap of ~ 4.4 - 4.9 eV and high electric breakdown s…