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eess.SY2021★ 1 cited
Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems
Zhian Kuang, Liting Sun, Huijun Gao +1
In this paper, a practical fractional-order variable-gain super-twisting algorithm (PFVSTA) is proposed to improve the tracking performance of wafer stages for semiconductor manufa…
eess.SY2021
Precise Motion Control of Wafer Stages via Adaptive Neural Network and Fractional-Order Super-Twisting Algorithm
Zhian Kuang, Liting Sun, Huijun Gao +1
To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC),…