415 citations · 609 across the 8 of their papers we have counts for
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physics.app-ph2023★ 10 cited
Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM
Minsun Gu, Moon Seop Hyun, Moonsup Han +2
Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspect…
cond-mat.mtrl-sci2023★ 18 cited
Electrical conductivity enhancement of epitaxially grown TiN thin films
Yeong Gwang Khim, Beomjin Park, Jin Eun Heo +7
Titanium nitride (TiN) presents superior electrical conductivity with mechanical and chemical stability and compatibility with the semiconductor fabrication process. Here, we fabri…