3 papers
physics.app-ph2024
A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices
Mohamed Yassine Bouhamidi, Chunhui Dai, Michel Stephan +8
Solid-state nanopores, nm-sized holes in thin, freestanding membranes, are powerful single-molecule sensors capable of interrogating a wide range of target analytes, from small mol…
physics.optics2024
High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators
Chang Zhang, Eeswar K. Yalavarthi, Mathieu Giroux +6
We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by strikin…
cond-mat.mtrl-sci2024
Long-Term Aging Study of a Silicon Nitride Nanomechanical Resonator
Michel Stephan, Alexandre Bouchard, Timothy Hodges +4
Short-term changes in the resonance frequency of silicon nitride (SiN) nanomechanical resonators can be measured very precisely due to low thermomechanical fluctuations resulting f…