34 citations · 53 across the 14 of their papers we have counts for
3 papers · 1 filter
On the Use of the Smith-McMillan Form in Decoupling System Dynamics
Clarisse Pétua Bosman Barros, Hans Butler, Roland Tóth
In this paper, the use of the Smith-McMillan form in decoupling multiple-input multiple-output system dynamics is analyzed. In short, from a transfer matrix plant model one can obt…
Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system
Ioannis Proimadis, Yorick Broens, Roland Tóth +1
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatron…
Physics-Guided Neural Networks for Inversion-based Feedforward Control applied to Linear Motors
Max Bolderman, Mircea Lazar, Hans Butler
Ever-increasing throughput specifications in semiconductor manufacturing require operating high-precision mechatronics, such as linear motors, at higher accelerations. In turn this…