4 papers
On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces
M. Farahani, T. Kozák, A. D. Pajdarová +2
High-power impulse magnetron sputtering (HiPIMS) delivers a high target power in short pulses, enhancing the ionization and energy of sputtered atoms and providing thus more possib…
A low-temperature synthesis of strongly thermochromic W and Sr co-doped VO2 films with a low transition temperature
Michal Kaufman, Jaroslav Vlcek, Jiri Houska +4
The reversible semiconductor-to-metal transition of vanadium dioxide (VO2) makes VO2-based coatings a promising candidate for thermochromic smart windows, reducing the energy consu…
Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
M. Farahani, T. Kozák, A. D. Pajdarová +1
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons…
Enhancement of hole mobility in high-rate reactively sputtered Cu2O thin films induced by laser thermal annealing
Jiri Rezek, Martin Kucera, Tomas Kozak +3
In presented work, a reactive high-power impulse magnetron sputtering (r-HiPIMS) was used for high-rate deposition ( 170 nm/min) of Cu2O films. Films were deposited on a standard s…