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20212026
most citedEffect of substrate temperature on the deposition of Al-doped ZnO thin films using high power impulse magnetron sputtering

36 citations · 85 across the 6 of their papers we have counts for

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physics.plasm-ph2023★ 14 cited

Deposition rate controls nucleation and growth during amorphous/nanocrystalline competition in sputtered Zr-Cr thin films

Q. Liebgott, A. Borroto, Z. Fernández-Gutiérrez +3

Dual-phase Zr-based thin films synthesized by magnetron co-sputtering and showing competitive growth between amorphous and crystalline phases have been reported recently. In such f…