most citedCoupling the motional quantum states of spatially distant ions using a conducting wire

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cond-mat.mtrl-sci2020

Making large overhangs in micrometer and nanometer-sized structures

Noah Van Horne, Manas Mukherjee

We describe two general procedures for fabricating microstructures with large overhangs and high aspect-ratio support pillars. The first method uses a static angled dry etch on mic…