Role of Ion Milling Angle in Determining Conducting and Insulating States on SrTiO3 Surfaces

Yuki K. Wakabayashia, Yoshiharu Krockenberger, Kosuke Takiguchi +2

SrTiO3 (STO), a promising wide-bandgap semiconductor for high-k capacitors and photocatalysis, requires precise surface control for device fabrication. This study investigates the…