Sequential Multi-Step Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single Molecule Fluorescence Detection

Hamza Khelidj, Badre Kerzabi, Igor Ozerov +3

Zero-mode waveguides (ZMWs) enable single-molecule fluorescence detection at micromolar concentrations by confining light to nanoscale volumes, overcoming the diffraction limit of…