15 citations · 15 across the 1 of their papers we have counts for
2 papers
physics.app-ph2020★ 15 cited
Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances
André G. Steckel, Henrik Bruus, Paul Muralt +1
We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin meta…
physics.app-ph2018
Effect of AlN Seed Layer on Crystallographic Characterization of Piezoelectric AlN
Kaitlin M. Howell, Waqas Bashir, Annalisa de Pastina +3
Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between cry…