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physics.plasm-ph1998
Modeling of ions energy distribution profile of electronegative plasma discharges with an efficient Monte Carlo simulator
M. Ardehali
The crucial role that Ions Energy Distribution Function (IEDF) at the electrodes plays in plasma processing of semiconductor materials demands that this quantity be predicted with…
physics.plasm-ph1998
Simulation and analysis of electron cyclotron resonance discharges
M. Ardehali
We describe in detail the method for Particle-in cell/Monte-Carlo simulation of electron cyclotron resonance (ECR) discharges. In the simulation, electric and magnetic fields are o…
physics.plasm-ph1998
Analysis of low pressure electro-positive and electro-negative rf plasmas with Monte Carlo method
M. Ardehali
Particle-in-cell/Monte Carlo technique is used to simulate low pressure electro-negative and electro-positive plasmas at a frequency of 10 MHz. The potential, electric field, elect…