Monolithic integration of a high-quality factor lithium niobate microresonator with a free-standing membrane waveguide using femtosecond laser assisted ion beam writing (FLAIBW)

Zhiwei Fang, Yingxin Xu, Min Wang +4

We demonstrate integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct wri…