Limit cycles and bifurcations in a nonlinear MEMS oscillator with a 1:3 internal resonance. Part I: The case of a driven resonator

S. Houri, D. Hatanaka, M. Asano +2

This work investigates the behavior of an AlGaAs/GaAs piezoelectric nonlinear MEMS oscillator exhibiting a 1:3 internal resonance. The device is explored in an open-loop configurat…