Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substrates

Kirill V. Chizh, Larisa V. Arapkina, Dmitry B. Stavrovsky +2

In the paper, the processes occurring during low-temperature growth of non-hydrogenated amorphous Si and polycrystalline Si films on multilayer Si${}_3$N${}_4$/SiO${}_2$/c-Si substrates…