Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon

Chuan Liao, Eckhart Fretwurst, Erika Garutti +8

This study focuses on the properties of the B${}_{\text{i}}$O${}_{\text{i}}$ (interstitial Boron~-~interstitial Oxygen) and C${}_{\text{i}}$O${}_{\text{i}}$ (interstitial Carbon~-~interstitial Oxy…