2 papers
physics.plasm-ph2019
The role of second-order radial density gradient for helicon power absorption
Runlong Wang, Lei Chang, Xinyue Hu +6
To reveal the mysterious and still controversial mechanism of high ionization efficiency during helicon discharges, this work focuses particularly on the role of second-order deriv…
physics.plasm-ph2018
Coupling of RF Antennas to Large Volume Helicon Plasma
Lei Chang, Xinyue Hu, Lei Gao +5
Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under…