8 citations · 13 across the 4 of their papers we have counts for
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physics.plasm-ph2018★ 1 cited
An Efficient Ionization Method for Pressure Up To Thousands of Pascals
Lei Chang, Xinyue Hu
A novel radio-frequency antenna consisting of isolated solenoids is reported to generate plasma for pressure up to thousands of pascals. The underlying mechanism involves capacitiv…
physics.plasm-ph2018
Coupling of RF Antennas to Large Volume Helicon Plasma
Lei Chang, Xinyue Hu, Lei Gao +5
Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under…