Radiation hardness of small-pitch 3D pixel sensors up to a fluence of $3\times 10^{16}$ n${}_{\mathrm{eq}}$/cm${}^2$

J. Lange, G. Giannini, S. Grinstein +5

Small-pitch 3D silicon pixel detectors have been investigated as radiation-hard candidates for the innermost layers of the HL-LHC pixel detector upgrades. Prototype 3D sensors with…