342 citations · 1.7k across the 16 of their papers we have counts for
Showing 2016 · quant-phShow all
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quant-ph2016
Micromachined integrated quantum circuit containing a superconducting qubit
T. Brecht, Y. Chu, C. Axline +6
We present a device demonstrating a lithographically patterned transmon integrated with a micromachined cavity resonator. Our two-cavity, one-qubit device is a multilayer microwave…
quant-ph2016★ 41 cited
Suspending superconducting qubits by silicon micromachining
Y. Chu, C. Axline, C. Wang +4
We present a method for relieving aluminum 3D transmon qubits from a silicon substrate using micromachining. Our technique is a high yield, one-step deep reactive ion etch that req…