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cond-mat.mtrl-sci2026
SC-1 Etching of Niobium and Titanium Nitride Thin Films
Adrián Gutiérrez-Cruz, K. A. C. Rathnathilaka, Jani M. Taskinen +6
Dry etching techniques, ubiquitous in microelectronics fabrication, often result in challenging levels of undesired collateral plasma-induced damage. In this work, we demonstrate a…
quant-ph2026
Multiplexed microwave resonators by frequency comb spectroscopy
Angelo Greco, Jukka-Pekka Kaikkonen, Luca Chirolli +4
Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency…