Heteroepitaxial Thin-Film Growth of a Ternary Nitride Semiconductor CaZn2N2

Masatake Tsuji, Kota Hanzawa, Hiroyuki Kinjo +2

Zinc-based nitride CaZn2N2 films grown by molecular beam epitaxy (MBE) with a plasma-assisted active nitrogen-radical source are promising candidates of next-generation semiconduct…