2 papers
cond-mat.mtrl-sci1999
Application of Ultraviolet Fluorescence in Wafer Surface Cleaning Analysis
Zhongwei Pan, Richard Chin
Ultraviolet fluorescence (UVF) is introduced as a novel and versatile method for the determination of the contamination of metal impurities on silicon wafer surfaces. The results g…
cond-mat.mtrl-sci1999
Application of Raman Scattering to Study the Strain Distribution in SiGe Layers
Zhongwei Pan, Richard Chin
In this paper, we mainly present a new simple, efficient and nondestructive Raman scattering analysis method to study the distribution of strain in SiGe alloy films. The method can…