most citedPatterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

12 citations · 12 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2019★ 12 cited

Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

D. Virganavičius, V. J. Cadarso, R. Kirchner +4

Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based…