collaborators

1 paper

cond-mat.mes-hall2019

Atomically Engineered Hf0.5Zr0.5O2 Integrated Nano-Electromechanical Transducers

Mayur Ghatge, Glen Walters, Toshikazu Nishida +1

The monolithic integration of electromechanical transduction at the nanoscale with advanced CMOS is among the most important challenges of semiconductor electronic systems to lever…