Strain-stress study of AlxGa1-xN/AlN heterostructures on c-plane sapphire and related optical properties

Y. Feng, V. Saravade, T. F. Chung +5

This work presents a systematic study of stress and strain of AlxGa1-xN/AlN with composition ranging from GaN to AlN, grown on a c-plane sapphire by metal-organic chemical vapor de…