D. König

most citedElectronic Structure Shift of Deep Nanoscale Silicon by SiO

_{2}

- vs. Si

_{3}

_{4}

-Embedding as Alternative to Impurity Doping

11 citations · 11 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mes-hall2019★ 11 cited

Electronic Structure Shift of Deep Nanoscale Silicon by SiO $_{2}$ - vs. Si $_{3}$ N $_{4}$ -Embedding as Alternative to Impurity Doping

Dirk König, Noël Wilck, Daniel Hiller +7

Conventional impurity doping of deep nanoscale silicon (dns-Si) used in ultra large scale integration (ULSI) faces serious challenges below the 14 nm technology node. We report on…

Electronic Structure Shift of Deep Nanoscale Silicon by SiO2​- vs. Si3​N4​-Embedding as Alternative to Impurity Doping

Electronic Structure Shift of Deep Nanoscale Silicon by SiO $_{2}$ - vs. Si $_{3}$ N $_{4}$ -Embedding as Alternative to Impurity Doping