Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller +6

Si nanopillars of less than 50 nm diameter have been irradiated in a helium ion microscope with a focused Ne${}^{+}$ beam. The morphological changes due to ion beam irradiation at room…