117 citations · 403 across the 8 of their papers we have counts for
4 papers · 1 filter
A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500°C in Air
Savannah R. Benbrook, Caitlin A. Chapin, Ruochen Lu +3
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO) MEMS resonator array up to 500°C in air.…
5-GHz Antisymmetric Mode Acoustic Delay Lines in Lithium Niobate Thin Film
Ruochen Lu, Yansong Yang, Ming-Huang Li +2
We present the first group of acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in Z-cut lithium niobate thin films. The demonstrated ADLs signifi…
High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform
Meisam Bahadori, Yansong Yang, Lynford L. Goddard +1
We present our design, fabrication, and experimental results for very high-performance isotropic microring resonators with small radii (~ 30 μm) based on single-mode strip waveguid…
4.5 GHz Lithium Niobate MEMS Filters with 10% Fractional Bandwidth for 5G Front-ends
Yansong Yang, Ruochen Lu, Liuqing Gao +1
This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetri…