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20192024
most citedAluminum Scandium Nitride as a Functional Material at 1000°C

15 citations · 15 across the 3 of their papers we have counts for

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physics.app-ph2019

Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins

Mehrdad Ramezani, Valeriy Felmetsger, Nicholas Rudawski +1

A fabrication process is developed to grow c-axis textured aluminum nitride (AlN) films on the sidewall of single crystal silicon (Si) micro-fins to realize fin bulk acoustic wave…