80 citations · 102 across the 7 of their papers we have counts for
7 papers
Synthesis of epitaxial TaO thin films on AlO by suboxide molecular-beam epitaxy and thermal laser epitaxy
Yorick A. Birkhölzer, Anna S. Park, Noah Schnitzer +28
Tantalum dioxide (TaO2) is a metastable tantalum compound. Here, we report the epitaxial stabilization of TaO2 on Al2O3 (1-102) (r-plane sapphire) substrates using suboxide molecul…
Adsorption-controlled Growth of Homoepitaxial c-plane Sapphire Films
Lena N. Majer, Tolga Acartürk, Peter A. van Aken +13
Sapphire is a technologically highly relevant material, but it poses many challenges to performing epitaxial thin-film deposition. We have identified and applied the conditions for…
alpha-Ta Films on c-plane Sapphire with Enhanced Microstructure
Lena N. Majer, Sander Smink, Wolfgang Braun +7
Superconducting films of alpha-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, alpha-Ta films suffer from many growth-induced structura…
Silicon-doped -GaO films grown at 1 m/h by suboxide molecular-beam epitaxy
Kathy Azizie, Felix V. E. Hensling, Cameron A. Gorsak +21
We report the use of suboxide molecular-beam epitaxy (S-MBE) to grow -GaO at a growth rate of ~1 m/h with control of the silicon doping concentration from 5x10…
Extending the kinetic and thermodynamic limits of molecular-beam epitaxy utilizing suboxide sources or metal-oxide catalyzed epitaxy
Patrick Vogt, Felix V. E. Hensling, Kathy Azizie +7
We observe a catalytic mechanism during the growth of III-O and IV-O materials by suboxide molecular-beam epitaxy (-MBE). By supplying the molecular catalysts InO and SnO we…
Adsorption-Controlled Growth of Ga2O3 by Suboxide Molecular-Beam Epitaxy
Patrick Vogt, Felix V. E. Hensling, Kathy Azizie +15
This paper introduces a growth method---suboxide molecular-beam epitaxy (S-MBE)---which enables the growth of Ga2O3 and related materials at growth rates exceeding 1 micrometer per…
SrTiO termination control: A method to tailor the oxygen exchange kinetics
Felix V. E. Hensling, Christoph Baeumer, Marc-André Rose +2
We provide insights into the influence of surface termination on the oxygen vacancy incorporation for the perovskite model material SrTiO3 during annealing in reducing gas environm…