2 papers
physics.app-ph2019
Mathematical Modelling and Comparative Study of Elliptical and Circular Capacitive Pressure Microsensor
Rishabh Bhooshan Mishra, S. Santosh Kumar
A lot of work on clamped circular, square and rectangular shaped capacitive pressure sensor has been carried out. However, to the best of our knowledge, no elaborate work has been…
physics.app-ph2019
Modeling and FEM-based Simulations of Composite Membrane based Circular Capacitive Pressure Sensor
Rishabh Bhooshan Mishra, S Santosh Kumar, Ravindra Mukhiya
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages o…