First Annealing Studies of Irradiated Silicon Sensors with Modified ATLAS Pixel Implantations

M. Wagner, A. Gisen, M. Hötting +8

Planar silicon pixel sensors with modified n${}^{+}$-implantation shapes based on the IBL pixel sensor were designed in Dortmund. The sensors with a pixel size of $250\mu$m $\times$ $5…