8 citations · 17 across the 3 of their papers we have counts for
3 papers
physics.app-ph2020★ 4 cited
Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection
Norbert Böwering, Christian Meier
Improvement of tool reliability and uptime is a current focus in development of extreme ultraviolet lithography. The lifetime of collection mirrors for extreme ultraviolet light in…
physics.app-ph2019★ 5 cited
Sticking behavior and transformation of tin droplets on silicon wafers and multilayer-coated mirrors
Norbert Böwering, Christian Meier
Silicon wafer and multilayer-coated mirror samples were exposed to impact of drops of molten tin to examine the adhesion behavior and cleaning possibilities. The sticking of tin dr…
physics.app-ph2018★ 8 cited
In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light
Norbert Böwering, Christian Meier
Tin-drop contamination was cleaned from multilayer-coated mirrors by induction of phase transformation. The β - α phase transition of tin was induced to initiate material embrittle…