2 papers
physics.app-ph2020
Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection
Norbert Böwering, Christian Meier
Improvement of tool reliability and uptime is a current focus in development of extreme ultraviolet lithography. The lifetime of collection mirrors for extreme ultraviolet light in…
physics.app-ph2019
Sticking behavior and transformation of tin droplets on silicon wafers and multilayer-coated mirrors
Norbert Böwering, Christian Meier
Silicon wafer and multilayer-coated mirror samples were exposed to impact of drops of molten tin to examine the adhesion behavior and cleaning possibilities. The sticking of tin dr…