Meyer-Neldel and anti-Meyer-Neldel rule in microcrystalline silicon and silicon carbide examined with Hall measurements

Torsten Bronger, Oleksandr Astakhov, Reinhard Carius

We study the electronic transport in lightly phosphorus-doped hydrogenated microcrystalline silicon ($\mu$c-Si:H) and nominally undoped hydrogenated silicon carbide ($\mu$c-SiC:H) by t…