Broadband Millimeter-Wave Anti-Reflection Coatings on Silicon Using Pyramidal Sub-Wavelength Structures

Karl Young, Qi Wen, Shaul Hanany +5

We used two novel approaches to produce sub-wavelength structure (SWS) anti-reflection coatings (ARC) on silicon for the millimeter and sub-millimeter (MSM) wave band: picosecond l…