collaborators

1 paper

cond-mat.mes-hall2019

A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications

J. G. Gluschke, F. Richter, A. P. Micolich

We report on a parylene chemical vapor deposition system custom designed for producing ultra-thin parylene films (5-100 nm thickness) for use as an electrical insulator in nanoscal…