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physics.app-ph2019
Optical deep learning nano-profilometry
Jinlong Zhu, Yanan Liu, Sanyogita Purandare +3
Determining the dimensions of nanostructures is critical to ensuring the maximum performance of many geometry-sensitive nanoscale functional devices. However, accurate metrology at…
physics.app-ph2019
High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform
Meisam Bahadori, Yansong Yang, Lynford L. Goddard +1
We present our design, fabrication, and experimental results for very high-performance isotropic microring resonators with small radii (~ 30 μm) based on single-mode strip waveguid…