197 citations · 209 across the 3 of their papers we have counts for
3 papers
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating
Jan Wernecke, Michael Krumrey, Armin Hoell +3
The feature sizes of only a few nanometers in modern nanotechnology and next-generation microelectronics continually increase the demand for suitable nanometrology tools. Grazing i…
Structural origin of gap states in semicrystalline polymers and the implications for charge transport
Jonathan Rivnay, Rodrigo Noriega, John E. Northrup +3
We quantify the degree of disorder in the π-π stacking direction of crystallites of a high performing semicrystalline semiconducting polymer with advanced X-ray lineshape analysis.…